Specifications |
ZPC-101 OBA |
Optical system |
Photoresist method (shading type) |
Light source |
Semiconductor laser |
Measuring range |
0.8μm~600μm (depending on different sensors) |
Detection channel |
64 channels (the number of channels can be edited at the same time), the particle size is arbitrarily set by the user |
Sensitivity |
0.8μm (ISO4402) or 3μm (c) (GB/T18854, ISO11171) |
Resolution |
<10% (GB/T18854, ISO11171) |
Repeatability |
RSD<2% |
Sample detection viscosity |
≤650cSt (if the viscosity is too large, it can be detected by heating or dilution method) |
Sampling volume |
0.2~1000mL, interval 0.1mL |
Sampling accuracy |
Better than ±0.5% |
Sampling speed |
5 ~ 80mL/min |
Air pressure chamber |
Positive and negative air pressure chamber device, realize sample degassing and high viscosity sample detection |
Maximum vacuum of air pressure chamber |
-0.08Mpa |
Maximum positive pressure of air chamber |
0.8 Mpa |
Overlap error limit |
12000~40000 particles/mL |
Temperature acquisition (optional) |
-40~100°C Accuracy: ±0.5°C |
Moisture (optional) |
Water activity collection: 1~100%RH; Accuracy: ±1%RH |
Absolute water content |
1~300ppm; Accuracy: ±10ppm |
Dielectric constant (optional) |
1~6 |
Viscosity (optional) |
0.5~50cP Accuracy: ±2% (>10cP), ±0.2cP (<10cP) |
Power supply |
110~245V AC, 50Hz, 70W |
Dimensions |
340mm × 310mm × 730mm |
Instrument net weight |
25kg |